倒装芯片焊球缺陷的高分辨激光超声检测技术(特邀)

    High resolution imaging of solder ball defects in flip chip packages using laser ultrasound (invited)

    • 倒装芯片技术以其信号传输速度快、损耗小、成本低等特性成为了微电子封装领域的主流技术,在航空、航天、汽车、电子、能源等诸多领域有着广泛的应用。随着倒装芯片焊点尺寸日益减小,且常服工况复杂,对倒装芯片内部互联焊点的可靠检测提出了挑战。基于光学麦克风的激光超声检测技术是一种新兴的非接触式无损检测技术,具有灵敏度高、频带宽等优点。文中重点开展纳秒脉冲激光作用于含焊球缺失(缺球)的倒装芯片三维有限元仿真研究,分析焊球缺失对倒装芯片表面温度场及位移场的影响规律。采用全光学激光超声检测系统对焊球缺失样件开展了成像检测研究,并提出采用多项式拟合系数特征提取方法对特征图谱处理。结果表明:基于光学麦克风的激光超声检测技术可实现600 μm焊球缺失的高分辨检测成像,所提出的特征提取方法信噪比相较PCA和ICA处理后的最大信噪比提升34.8%。文中提出的激光超声检测技术为倒装芯片焊球缺失缺陷的高分辨成像检测提供了有效手段。

       

      Abstract:
      Objective Flip-chip technology is widely used in advanced microelectronic packaging due to its high signal transmission speed, low interconnection loss, and compact structure. However, with the continuous miniaturization of solder bumps and their operation under harsh conditions, internal defects such as missing solder bumps seriously threaten packaging reliability. Laser ultrasonic testing based on an optical microphone is an emerging non-contact nondestructive technique with high sensitivity and wide bandwidth. This study evaluates the feasibility of applying all-optical laser ultrasonic testing for high-resolution detection of solder bump defects in flip-chip structures.
      Methods A three-dimensional thermo-mechanical coupled finite element model containing missing solder bumps is established to investigate the effects of defects on temperature and displacement fields. Simulated flip-chip specimens with missing solder balls (600 μm diameter and 400 μm height) are fabricated and inspected using an all-optical laser ultrasonic system based on an optical microphone. Laser ultrasonic A-, and C-scan imaging experiments are conducted. A polynomial fitting coefficient method is proposed for C-scan data processing.
      Results and Discussions Simulation results show that missing solder bumps cause significant variations in temperature and displacement fields, which affect laser-induced ultrasonic responses. Experimental results demonstrate that the proposed system achieves high-resolution imaging of missing solder bumps with a diameter of 600 μm. Clear distinctions between normal solder bump regions and defect regions are observed in A- and C-scan images (Fig.6 and Fig.7). The proposed polynomial fitting method provides the highest signal-to-noise ratio, achieving a 5.26-fold improvement over the original signal and outperforming PCA and ICA methods (Fig.8).
      Conclusions Both simulation and experimental results demonstrate that all-optical laser ultrasonic testing based on an optical microphone enables non-contact, high-resolution detection of missing solder bump defects in flip-chip packaging, providing a promising approach for reliability inspection of advanced microelectronic interconnections.

       

    /

    返回文章
    返回